Photon-assisted CVD

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	Pr3703-Pr3713
Number of pages	11
Journal	Journal de Physique IV (Proceedings)
Volume	11
Issue number	3
DOIs	https://doi.org/10.1051/jp4:2001389
Publication status	Published - Jan 2001

Fields of science

@article{7ed1cdc372264b928d095ef2bf73d5e3,

title = "Photon-assisted CVD",

author = "Klaus Piglmayer and Mats Boman and M. Lindstam and R. Chabicovsky",

year = "2001",

month = jan,

doi = "10.1051/jp4:2001389",

language = "English",

volume = "11",

pages = "Pr3703--Pr3713",

journal = "Journal de Physique IV (Proceedings)",

issn = "1764-7177",

number = "3",

}

TY - JOUR

T1 - Photon-assisted CVD

AU - Piglmayer, Klaus

AU - Boman, Mats

AU - Lindstam, M.

AU - Chabicovsky, R.

PY - 2001/1

Y1 - 2001/1

UR - https://www.scopus.com/pages/publications/0034855034

U2 - 10.1051/jp4:2001389

DO - 10.1051/jp4:2001389

M3 - Conference article

SN - 1764-7177

VL - 11

SP - Pr3703-Pr3713

JO - Journal de Physique IV (Proceedings)

JF - Journal de Physique IV (Proceedings)

IS - 3

ER -