Periodic structures in pyrolytic laser-CVD of W from WCl
            6

P.B. Kargl; R. Kullmer; Dieter Bäuerle

doi:10.1007/BF00331441

Periodic structures in pyrolytic laser-CVD of W from WCl ₆

P.B. Kargl
, R. Kullmer
, Dieter Bäuerle

Institute of Applied Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	175-179
Number of pages	5
Journal	Applied Physics A
Volume	57
Issue number	2
DOIs	https://doi.org/10.1007/BF00331441
Publication status	Published - Aug 1993

Fields of science

103016 Laser physics
103020 Surface physics
103 Physics, Astronomy
103008 Experimental physics
103021 Optics
103023 Polymer physics

JKU Focus areas

Engineering and Natural Sciences (in general)

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10.1007/BF00331441

Cite this

@article{cb0360302a0a4b8ebdbabb6f9fe394e7,

title = "Periodic structures in pyrolytic laser-CVD of W from WCl 6",

author = "P.B. Kargl and R. Kullmer and Dieter B{\"a}uerle",

year = "1993",

month = aug,

doi = "10.1007/BF00331441",

language = "English",

volume = "57",

pages = "175--179",

journal = "Applied Physics A",

issn = "1432-0630",

publisher = "Springer Verlag",

number = "2",

}

TY - JOUR

T1 - Periodic structures in pyrolytic laser-CVD of W from WCl 6

AU - Kargl, P.B.

AU - Kullmer, R.

AU - Bäuerle, Dieter

PY - 1993/8

Y1 - 1993/8

UR - https://www.scopus.com/pages/publications/0007741615

U2 - 10.1007/BF00331441

DO - 10.1007/BF00331441

M3 - Article

SN - 1432-0630

VL - 57

SP - 175

EP - 179

JO - Applied Physics A

JF - Applied Physics A

IS - 2

ER -

Periodic structures in pyrolytic laser-CVD of W from WCl 6

Fields of science

JKU Focus areas

Access to Document

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Cite this

Periodic structures in pyrolytic laser-CVD of W from WCl ₆