Periodic Structures in Laser-Induced Direct Writing of Poly-Silicon

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Original language	English
Title of host publication	Laser Processing and Diagnostics II
Editors	D. Bäuerle, K.L. Kompa, L.D. Laude
Place of Publication	Les Ulis
Publisher	Les Editions de Physique
Pages	91
Number of pages	10
Publication status	Published - 1986

Fields of science

@inbook{68ab5a4ba5fd48fcb1425bde17a1a1eb,

title = "Periodic Structures in Laser-Induced Direct Writing of Poly-Silicon",

author = "Tamas Sz{\"o}r{\'e}nyi and Zhang, \{Gui qiang\} and Y.C. Du and R. Kullmer and Dieter B{\"a}uerle",

year = "1986",

language = "English",

pages = "91",

editor = "\{D. B{\"a}uerle, K.L. Kompa, L.D. Laude\}",

booktitle = "Laser Processing and Diagnostics II",

publisher = "Les Editions de Physique",

}