| Original language | English |
|---|---|
| Pages (from-to) | 213-222 |
| Number of pages | 10 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3328 |
| DOIs | |
| Publication status | Published - 1998 |
| Externally published | Yes |
| Event | Smart Structures and Materials 1998: Smart Electronics and MEMS - San Diego, CA, United States Duration: 02 Mar 1998 → 02 Mar 1998 |
Fields of science
- 202 Electrical Engineering, Electronics, Information Engineering