Oscillations in laser direct writing of W from WCl6 and H2 : A theoretical analysis

Nikita Arnold; P.B. Kargl; R. Kullmer; Dieter Bäuerle

doi:10.1007/BF01540106

Oscillations in laser direct writing of W from WCl6 and H2 : A theoretical analysis

Nikita Arnold
, P.B. Kargl
, R. Kullmer
, Dieter Bäuerle

Institute of Applied Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	347-351
Number of pages	5
Journal	Applied Physics A
Volume	61
Issue number	4
DOIs	https://doi.org/10.1007/BF01540106
Publication status	Published - Oct 1995

Fields of science

103016 Laser physics
103020 Surface physics
103 Physics, Astronomy
103008 Experimental physics
103021 Optics
103023 Polymer physics

JKU Focus areas

Engineering and Natural Sciences (in general)

Access to Document

10.1007/BF01540106

Cite this

@article{35afe90cf71c48b7937163d0956b025d,

title = "Oscillations in laser direct writing of W from WCl6 and H2 : A theoretical analysis",

author = "Nikita Arnold and P.B. Kargl and R. Kullmer and Dieter B{\"a}uerle",

year = "1995",

month = oct,

doi = "10.1007/BF01540106",

language = "English",

volume = "61",

pages = "347--351",

journal = "Applied Physics A",

issn = "1432-0630",

publisher = "Springer Verlag",

number = "4",

}

TY - JOUR

T1 - Oscillations in laser direct writing of W from WCl6 and H2 : A theoretical analysis

AU - Arnold, Nikita

AU - Kargl, P.B.

AU - Kullmer, R.

AU - Bäuerle, Dieter

PY - 1995/10

Y1 - 1995/10

UR - https://www.scopus.com/pages/publications/0029388699

U2 - 10.1007/BF01540106

DO - 10.1007/BF01540106

M3 - Article

SN - 1432-0630

VL - 61

SP - 347

EP - 351

JO - Applied Physics A

JF - Applied Physics A

IS - 4

ER -

Oscillations in laser direct writing of W from WCl6 and H2 : A theoretical analysis

Fields of science

JKU Focus areas

Access to Document

Other files and links

Cite this