Ordered SiGe islands on vicinal and pre-patterned Si(001) substrates

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1730-1735
Number of pages6
JournalMicroelectronic Engineering
Volume83
Issue number4-9 SPEC. ISS.
DOIs
Publication statusPublished - Apr 2006

Fields of science

  • 103 Physics, Astronomy
  • 103009 Solid state physics
  • 103011 Semiconductor physics
  • 103017 Magnetism
  • 103018 Materials physics
  • 210006 Nanotechnology
  • 103040 Photonics
  • 202032 Photovoltaics

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