Optimization of ITO-Based Plasmonic Slot Waveguide for CO2 Mid-IR Absorption Sensors

  • Parviz Saeidi
  • , Bernhard Jakoby
  • , Gerald Pühringer
  • , Andreas Tortschanoff
  • , Thomas Grille
  • , Reyhaneh Jannesari

Research output: Chapter in Book/Report/Conference proceedingConference proceedingspeer-review

Abstract

In this work, an ITO-based plasmonic slot waveguide is numerically analyzed for CO2 sensing applications. Our waveguide is de-signed based on Indium Tin Oxide on a silica substrate layer. As for sensing application both evanescent field ratio and propagation length play an important role, our structure is optimized based on the figure of merit defined by the product of the two aforementioned quantities. From our simulations, the optimum parameters for slot width and height of 500 nm and 1100 nm were obtained, respectively, based on this figure of merit.
Original languageGerman (Austria)
Title of host publicationSMSI 2021 - Sensors and Instrumentation
Pages163 - 164
Number of pages2
DOIs
Publication statusPublished - 2021

Publication series

NameSMSI - Sensor and Measurement Science International

Fields of science

  • 202019 High frequency engineering
  • 202021 Industrial electronics
  • 202036 Sensor systems
  • 203017 Micromechanics
  • 202 Electrical Engineering, Electronics, Information Engineering
  • 202027 Mechatronics
  • 202028 Microelectronics
  • 202037 Signal processing

JKU Focus areas

  • Digital Transformation

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