Abstract
A low cost 3D non–contacting profile scanning method for both specular and diffuse reflecting surfaces will be presented. The resolution in x– and y–directions is about 650 nm and 1 µm in out of plane direction. The method is based on a commercially available CD pickup head. The CD pickup head will be driven in a way that the error of focus signal is used for an out of plane measurement (optical pro-filometer). Theoretical relations as well as mea-surement results will be shown in this proposed paper.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the XX IMEKO World Congress |
| Number of pages | 5 |
| Publication status | Published - Sept 2012 |
Fields of science
- 102003 Image processing
- 202024 Laser technology
- 202037 Signal processing
- 203016 Measurement engineering
JKU Focus areas
- Mechatronics and Information Processing