Optical Near Field Effects in Surface Nanostructuring and Laser Cleaning

H.-J. Münzer; M. Mosbacher; M. Bertsch; B.-U. Runge; Dieter Bäuerle; J. Boneberg; Paul Leiderer

doi:10.1117/12.456827

Optical Near Field Effects in Surface Nanostructuring and Laser Cleaning

H.-J. Münzer, M. Mosbacher, M. Bertsch, B.-U. Runge, Dieter Bäuerle, J. Boneberg, Paul Leiderer

Institute of Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	Second International Symposium on Laser Precision Microfabrication
Pages	180-183
Number of pages	4
Volume	4426
DOIs	https://doi.org/10.1117/12.456827
Publication status	Published - Jan 2002

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering

Fields of science

103016 Laser physics
210005 Nanophotonics

JKU Focus areas

Engineering and Natural Sciences (in general)

Access to Document

10.1117/12.456827

Cite this

Münzer, H.-J., Mosbacher, M., Bertsch, M., Runge, B.-U., Bäuerle, D., Boneberg, J., & Leiderer, P. (2002). Optical Near Field Effects in Surface Nanostructuring and Laser Cleaning. In Second International Symposium on Laser Precision Microfabrication (Vol. 4426, pp. 180-183). (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.456827

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title = "Optical Near Field Effects in Surface Nanostructuring and Laser Cleaning",

author = "H.-J. M{\"u}nzer and M. Mosbacher and M. Bertsch and B.-U. Runge and Dieter B{\"a}uerle and J. Boneberg and Paul Leiderer",

year = "2002",

month = jan,

doi = "10.1117/12.456827",

language = "English",

volume = "4426",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

pages = "180--183",

booktitle = "Second International Symposium on Laser Precision Microfabrication",

}

Münzer, H-J, Mosbacher, M, Bertsch, M, Runge, B-U, Bäuerle, D, Boneberg, J & Leiderer, P 2002, Optical Near Field Effects in Surface Nanostructuring and Laser Cleaning. in Second International Symposium on Laser Precision Microfabrication. vol. 4426, Proceedings of SPIE - The International Society for Optical Engineering, pp. 180-183. https://doi.org/10.1117/12.456827

Optical Near Field Effects in Surface Nanostructuring and Laser Cleaning. / Münzer, H.-J.; Mosbacher, M.; Bertsch, M. et al.
Second International Symposium on Laser Precision Microfabrication. Vol. 4426 2002. p. 180-183 (Proceedings of SPIE - The International Society for Optical Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

TY - GEN

T1 - Optical Near Field Effects in Surface Nanostructuring and Laser Cleaning

AU - Münzer, H.-J.

AU - Mosbacher, M.

AU - Bertsch, M.

AU - Runge, B.-U.

AU - Bäuerle, Dieter

AU - Boneberg, J.

AU - Leiderer, Paul

PY - 2002/1

Y1 - 2002/1

U2 - 10.1117/12.456827

DO - 10.1117/12.456827

M3 - Conference proceedings

VL - 4426

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 180

EP - 183

BT - Second International Symposium on Laser Precision Microfabrication

ER -