| Original language | English |
|---|---|
| Title of host publication | Micromanufacturing Engineering and Technology |
| Subtitle of host publication | Second Edition |
| Editors | Yi Qin |
| Pages | 705-714 |
| Number of pages | 10 |
| ISBN (Electronic) | 9780323312677 |
| DOIs | |
| Publication status | Published - 18 May 2015 |
Fields of science
- 210006 Nanotechnology
- 103020 Surface physics
- 103021 Optics
JKU Focus areas
- Engineering and Natural Sciences (in general)
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