TY - GEN
T1 - On-wafer Passives De-Embedding Based on Open-pad and Transmission Line measurement
AU - Hamidipour, Abouzar
AU - Jahn, Martin
AU - Starzer, Florian
AU - Wang, Xin
AU - Stelzer, Andreas
PY - 2010/10
Y1 - 2010/10
N2 - In this paper, a new de‑embedding technique based on open‑pad and
Transmission Line (TL) measurement is discussed. This technique can
be used as an efficient approach to characterize on‑chip passives in
the millimeter wave range. Using open‑pad measurement, parallel
parasitics are extracted and removed in the first step. Cross‑talk
parasitics between two pads that are kept at a constant distance can
be assumed constant, and thus both cross‑talk and parallel parasitics
can be removed. Subsequently, the transfer function matrix of a singleended
TL is used to de‑embed series parasitics from the measurement
results. This calculation leads to a better extraction and removal of the
series parasitics compared to using a conventional short dummy
pattern. The measurement results are in a close agreement with the
simulations up to 110 GHz.
AB - In this paper, a new de‑embedding technique based on open‑pad and
Transmission Line (TL) measurement is discussed. This technique can
be used as an efficient approach to characterize on‑chip passives in
the millimeter wave range. Using open‑pad measurement, parallel
parasitics are extracted and removed in the first step. Cross‑talk
parasitics between two pads that are kept at a constant distance can
be assumed constant, and thus both cross‑talk and parallel parasitics
can be removed. Subsequently, the transfer function matrix of a singleended
TL is used to de‑embed series parasitics from the measurement
results. This calculation leads to a better extraction and removal of the
series parasitics compared to using a conventional short dummy
pattern. The measurement results are in a close agreement with the
simulations up to 110 GHz.
UR - https://www.scopus.com/pages/publications/78651393040
U2 - 10.1109/BIPOL.2010.5667930
DO - 10.1109/BIPOL.2010.5667930
M3 - Conference proceedings
SN - 978-1-4244-8578-9
T3 - Proceedings of the IEEE Bipolar/BiCMOS Circuits and Technology Meeting
SP - 102
EP - 105
BT - Proceedings of IEEE Bipolar BiCMOS Circuits and Technology Meeting
A2 - IEEE, null
ER -