On the reaction mechanism in laser-induced deposition of Tungsten microstructures from WF6/H2

Research output: Contribution to journal › Conference article › peer-review

Fields of science

@article{4228318a961e4bbb9e4c675a6ef90744,

title = "On the reaction mechanism in laser-induced deposition of Tungsten microstructures from WF6/H2",

author = "Klaus Piglmayer and Helmut Schieche and R. Chabicovsky",

year = "2000",

month = feb,

day = "1",

doi = "10.1016/S0169-4332(99)00424-9",

language = "English",

volume = "154-155",

pages = "365--368",

journal = "Applied Surface Science",

issn = "1873-5584",

publisher = "Elsevier",

}

TY - JOUR

T1 - On the reaction mechanism in laser-induced deposition of Tungsten microstructures from WF6/H2

AU - Piglmayer, Klaus

AU - Schieche, Helmut

AU - Chabicovsky, R.

PY - 2000/2/1

Y1 - 2000/2/1

UR - https://www.scopus.com/pages/publications/0033875778

U2 - 10.1016/S0169-4332(99)00424-9

DO - 10.1016/S0169-4332(99)00424-9

M3 - Conference article

SN - 1873-5584

VL - 154-155

SP - 365

EP - 368

JO - Applied Surface Science

JF - Applied Surface Science

ER -