On-line growth control of MOCVD deposited GaN and related ternary compounds via spectroscopic ellipsometry and x-ray diffraction

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)2259-2264
Number of pages6
JournalPhysica Status Solidi A: Applications and Materials Science
Volume201
Issue number9
DOIs
Publication statusPublished - 2004

Fields of science

  • 103 Physics, Astronomy
  • 103009 Solid state physics
  • 103011 Semiconductor physics
  • 103017 Magnetism
  • 103018 Materials physics
  • 210006 Nanotechnology
  • 103040 Photonics
  • 202032 Photovoltaics

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