TY - GEN
T1 - Numerical Investigations of Infrared Slot Waveguides for Gas Sensing
AU - Ranacher, Christian
AU - Tortschanoff, Andreas
AU - Consani, Cristina
AU - Jannesari, Reyhaneh
AU - Grille, Thomas
AU - Jakoby, Bernhard
PY - 2018
Y1 - 2018
N2 - Sensing of gases is a promising area for applications of photonic sensor devices that operate in the mid-infrared spectral range. We present a numerical investigation of slot waveguides for evanescent field sensing of CO2. The sensor platform is a poly-silicon slot waveguide on silicon dioxide, where both layers are deposited on a standard silicon substrate. The evanescent field ratio, which is a crucial parameter for the sensing performance of the waveguides, was determined and values as high as 42% were obtained.
AB - Sensing of gases is a promising area for applications of photonic sensor devices that operate in the mid-infrared spectral range. We present a numerical investigation of slot waveguides for evanescent field sensing of CO2. The sensor platform is a poly-silicon slot waveguide on silicon dioxide, where both layers are deposited on a standard silicon substrate. The evanescent field ratio, which is a crucial parameter for the sensing performance of the waveguides, was determined and values as high as 42% were obtained.
UR - http://www.mdpi.com/2504-3900/2/13/799
U2 - 10.3390/proceedings2130799
DO - 10.3390/proceedings2130799
M3 - Conference proceedings
VL - 2
T3 - Proceedings (MDPI)
BT - Proceedings Eurosensors 2018
ER -