Numerical Investigations of Infrared Slot Waveguides for Gas Sensing

Christian Ranacher, Andreas Tortschanoff, Cristina Consani, Reyhaneh Jannesari, Thomas Grille, Bernhard Jakoby

Research output: Chapter in Book/Report/Conference proceedingConference proceedingspeer-review

Abstract

Sensing of gases is a promising area for applications of photonic sensor devices that operate in the mid-infrared spectral range. We present a numerical investigation of slot waveguides for evanescent field sensing of CO2. The sensor platform is a poly-silicon slot waveguide on silicon dioxide, where both layers are deposited on a standard silicon substrate. The evanescent field ratio, which is a crucial parameter for the sensing performance of the waveguides, was determined and values as high as 42% were obtained.
Original languageEnglish
Title of host publicationProceedings Eurosensors 2018
Number of pages5
Volume2
DOIs
Publication statusPublished - 2018

Publication series

NameProceedings (MDPI)
ISSN (Print)2504-3900

Fields of science

  • 202036 Sensor systems
  • 202 Electrical Engineering, Electronics, Information Engineering
  • 202027 Mechatronics
  • 202028 Microelectronics

JKU Focus areas

  • Mechatronics and Information Processing

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