Novel Micromachined Vibrating Beam Sensor for the Viscosity Measurement of Complex Liquids

Christian Riesch, Franz Keplinger, Erwin Reichel, Bernhard Jakoby

Research output: Chapter in Book/Report/Conference proceedingConference proceedingspeer-review

Abstract

In this work we present a novel experimental setup for measuring liquid properties utilizing three different acoustic sensors. We compare the applicability and associated measurement results for electromagnetically excited cantilever and membrane or plate resonators, as well as a quartz crystal resonator. This work aims at comparing the characteristics of these different sensor principles. The setup combines suitable liquid reservoirs for all three sensors in a temperature-stabilized environment.
Original languageEnglish
Title of host publicationTagungsband zur Informationstagung Mikroelektronik 08
Pages60-63
Number of pages4
Publication statusPublished - Oct 2008

Fields of science

  • 202036 Sensor systems

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