Non-Piezoelectric Resonant Acoustic Sensors

Christian Riesch; Erwin Reichel; Frieder Lucklum; Bernhard Jakoby

Non-Piezoelectric Resonant Acoustic Sensors

Christian Riesch, Erwin Reichel, Frieder Lucklum, Bernhard Jakoby

Institute of Microelectronics and Microsensors

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Abstract

Resonant acoustic sensors are traditionally based on the piezoelectric effect. More recently, capacitive micromachined transducer (CMUT) and film bulk acoustic resonator (FBAR) technologies featuring alternative transduction mechanisms have been investigated. Our research has recently dealt with different possibilities of electromagnetic excitation based on the utilization of Lorentz forces in acoustic resonator elements, thus avoiding the necessity of piezoelectric materials. In this contribution we present three selected sensor elements for different applications and associated recent experimental results.

Original language	English
Title of host publication	Konferenzband - VDI Fachtagung Sensoren und Messsysteme 2008
Editors	VDI
Pages	67 - 76
Number of pages	10
Publication status	Published - Mar 2008

Fields of science

202036 Sensor systems

Cite this

@inproceedings{cad0aedec3b0491bb57dcc8f7183232d,

title = "Non-Piezoelectric Resonant Acoustic Sensors",

abstract = "Resonant acoustic sensors are traditionally based on the piezoelectric effect. More recently, capacitive micromachined transducer (CMUT) and film bulk acoustic resonator (FBAR) technologies featuring alternative transduction mechanisms have been investigated. Our research has recently dealt with different possibilities of electromagnetic excitation based on the utilization of Lorentz forces in acoustic resonator elements, thus avoiding the necessity of piezoelectric materials. In this contribution we present three selected sensor elements for different applications and associated recent experimental results.",

author = "Christian Riesch and Erwin Reichel and Frieder Lucklum and Bernhard Jakoby",

year = "2008",

month = mar,

language = "English",

isbn = "978-3-18-092011-5",

pages = "67 -- 76",

editor = "VDI",

booktitle = "Konferenzband - VDI Fachtagung Sensoren und Messsysteme 2008",

}

TY - GEN

T1 - Non-Piezoelectric Resonant Acoustic Sensors

AU - Riesch, Christian

AU - Reichel, Erwin

AU - Lucklum, Frieder

AU - Jakoby, Bernhard

PY - 2008/3

Y1 - 2008/3

N2 - Resonant acoustic sensors are traditionally based on the piezoelectric effect. More recently, capacitive micromachined transducer (CMUT) and film bulk acoustic resonator (FBAR) technologies featuring alternative transduction mechanisms have been investigated. Our research has recently dealt with different possibilities of electromagnetic excitation based on the utilization of Lorentz forces in acoustic resonator elements, thus avoiding the necessity of piezoelectric materials. In this contribution we present three selected sensor elements for different applications and associated recent experimental results.

AB - Resonant acoustic sensors are traditionally based on the piezoelectric effect. More recently, capacitive micromachined transducer (CMUT) and film bulk acoustic resonator (FBAR) technologies featuring alternative transduction mechanisms have been investigated. Our research has recently dealt with different possibilities of electromagnetic excitation based on the utilization of Lorentz forces in acoustic resonator elements, thus avoiding the necessity of piezoelectric materials. In this contribution we present three selected sensor elements for different applications and associated recent experimental results.

M3 - Conference proceedings

SN - 978-3-18-092011-5

SP - 67

EP - 76

BT - Konferenzband - VDI Fachtagung Sensoren und Messsysteme 2008

A2 - VDI, null

ER -