Non-destructive quantitative analysis of the Ge concentration in SiGe quantum wells by means of low energy RBS

Friedrich Schäffler, Michael Mühlberger, Peter Bauer, Markus Draxler

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	733-740
Number of pages	8
Journal	Nuclear Instruments and Methods in Physics Research Section B
Volume	240
Issue number	3
DOIs	https://doi.org/10.1016/j.nimb.2005.04.133
Publication status	Published - Nov 2005

Fields of science

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title = "Non-destructive quantitative analysis of the Ge concentration in SiGe quantum wells by means of low energy RBS",

author = "Friedrich Sch{\"a}ffler and Michael M{\"u}hlberger and Peter Bauer and Markus Draxler",

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T1 - Non-destructive quantitative analysis of the Ge concentration in SiGe quantum wells by means of low energy RBS

AU - Schäffler, Friedrich

AU - Mühlberger, Michael

AU - Bauer, Peter

AU - Draxler, Markus

PY - 2005/11

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U2 - 10.1016/j.nimb.2005.04.133

DO - 10.1016/j.nimb.2005.04.133

M3 - Article

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JO - Nuclear Instruments and Methods in Physics Research Section B

JF - Nuclear Instruments and Methods in Physics Research Section B

IS - 3

ER -