New Types of Periodic Structures in Laser-Induced Chemical Vapor Deposition

Y.C. Du; Ulrich Kempfer; Klaus Piglmayer; Dieter Bäuerle; Urbanus Maria Titulaer

doi:10.1007/BF00620731

New Types of Periodic Structures in Laser-Induced Chemical Vapor Deposition

Y.C. Du, Ulrich Kempfer, Klaus Piglmayer, Dieter Bäuerle, Urbanus Maria Titulaer

Institute of Applied Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	167–171
Number of pages	5
Journal	Applied Physics A
Volume	39
Issue number	3
DOIs	https://doi.org/10.1007/BF00620731
Publication status	Published - Mar 1986

Fields of science

103016 Laser physics
103020 Surface physics
103 Physics, Astronomy
103008 Experimental physics
103021 Optics
103023 Polymer physics

JKU Focus areas

Engineering and Natural Sciences (in general)

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10.1007/BF00620731

Cite this

@article{ec371e2c650e47f68d57c51e79e63829,

title = "New Types of Periodic Structures in Laser-Induced Chemical Vapor Deposition",

author = "Y.C. Du and Ulrich Kempfer and Klaus Piglmayer and Dieter B{\"a}uerle and Titulaer, \{Urbanus Maria\}",

year = "1986",

month = mar,

doi = "10.1007/BF00620731",

language = "English",

volume = "39",

pages = "167–171",

journal = "Applied Physics A",

issn = "1432-0630",

publisher = "Springer Verlag",

number = "3",

}

TY - JOUR

T1 - New Types of Periodic Structures in Laser-Induced Chemical Vapor Deposition

AU - Du, Y.C.

AU - Kempfer, Ulrich

AU - Piglmayer, Klaus

AU - Bäuerle, Dieter

AU - Titulaer, Urbanus Maria

PY - 1986/3

Y1 - 1986/3

UR - https://www.scopus.com/pages/publications/0022681259

U2 - 10.1007/BF00620731

DO - 10.1007/BF00620731

M3 - Article

SN - 1432-0630

VL - 39

SP - 167

EP - 171

JO - Applied Physics A

JF - Applied Physics A

IS - 3

ER -

New Types of Periodic Structures in Laser-Induced Chemical Vapor Deposition

Fields of science

JKU Focus areas

Access to Document

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Cite this