Nanopatterning of Si(001) for bottom-up fabrication of nanostructures

Yanfang Hu; A. K. Das; H. Kalachi H.; Reinhold Koch

doi:10.1088/0957-4484/23/16/165301

Nanopatterning of Si(001) for bottom-up fabrication of nanostructures

Yanfang Hu, A. K. Das, H. Kalachi H., Reinhold Koch

Department of Solid State Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	165301
Pages (from-to)	165301/1-6
Number of pages	6
Journal	Nanotechnology
Volume	23
Issue number	16
DOIs	https://doi.org/10.1088/0957-4484/23/16/165301
Publication status	Published - 27 Apr 2012

Fields of science

103009 Solid state physics
103021 Optics
103011 Semiconductor physics
103 Physics, Astronomy

JKU Focus areas

Engineering and Natural Sciences (in general)

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10.1088/0957-4484/23/16/165301

Cite this

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title = "Nanopatterning of Si(001) for bottom-up fabrication of nanostructures",

author = "Yanfang Hu and Das, \{A. K.\} and \{Kalachi H.\}, H. and Reinhold Koch",

year = "2012",

month = apr,

day = "27",

doi = "10.1088/0957-4484/23/16/165301",

language = "English",

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journal = "Nanotechnology",

issn = "0957-4484",

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TY - JOUR

T1 - Nanopatterning of Si(001) for bottom-up fabrication of nanostructures

AU - Hu, Yanfang

AU - Das, A. K.

AU - Kalachi H., H.

AU - Koch, Reinhold

PY - 2012/4/27

Y1 - 2012/4/27

UR - https://www.scopus.com/pages/publications/84859345636

U2 - 10.1088/0957-4484/23/16/165301

DO - 10.1088/0957-4484/23/16/165301

M3 - Article

SN - 0957-4484

VL - 23

SP - 165301/1-6

JO - Nanotechnology

JF - Nanotechnology

IS - 16

M1 - 165301

ER -

Nanopatterning of Si(001) for bottom-up fabrication of nanostructures

Fields of science

JKU Focus areas

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