Nanopatterning of Si(001) for bottom-up fabrication of nanostructures

Yanfang Hu, A. K. Das, H. Kalachi H., Reinhold Koch

Research output: Contribution to journal › Article › peer-review

Fields of science

@article{d2debd3dbb05478f91ac3b5f1143f62e,

title = "Nanopatterning of Si(001) for bottom-up fabrication of nanostructures",

author = "Yanfang Hu and Das, {A. K.} and {Kalachi H.}, H. and Reinhold Koch",

year = "2012",

doi = "10.1088/0957-4484/23/16/165301",

language = "English",

volume = "23",

pages = "165301/1--6",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "IOP Publishing",

}