Multiscale Approach for the Analysis of Channeling Profile Measurements of Ion Implantation Damage

G. Hobler, G. Otto, D. Kovac, Leopold Palmetshofer, Karl Emanuel Mayerhofer, Kurt Piplits

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	360-363
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and
Volume	228
Publication status	Published - 2005

Fields of science

@article{b393f483d4964ec69a477cfe94c80e51,

title = "Multiscale Approach for the Analysis of Channeling Profile Measurements of Ion Implantation Damage",

author = "G. Hobler and G. Otto and D. Kovac and Leopold Palmetshofer and Mayerhofer, {Karl Emanuel} and Kurt Piplits",

year = "2005",

language = "English",

volume = "228",

pages = "360--363",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and",

issn = "1872-9584",

publisher = "Elsevier",

}

TY - JOUR

T1 - Multiscale Approach for the Analysis of Channeling Profile Measurements of Ion Implantation Damage

AU - Hobler, G.

AU - Otto, G.

AU - Kovac, D.

AU - Palmetshofer, Leopold

AU - Mayerhofer, Karl Emanuel

AU - Piplits, Kurt

PY - 2005

Y1 - 2005

M3 - Article

SN - 1872-9584

VL - 228

SP - 360

EP - 363

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and

ER -