Monte Carlo Simulation of Channelled Phosphorus Implantations in Silicon

S. Herzog, A. Simionescu, G. Hobler, Leopold Palmetshofer, Kurt Piplits, M. Grasserbauer

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings

Fields of science

This output contributes to the following UN Sustainable Development Goals (SDGs)

@inproceedings{534c665b9a0645e699b59037d12af157,

title = "Monte Carlo Simulation of Channelled Phosphorus Implantations in Silicon",

author = "S. Herzog and A. Simionescu and G. Hobler and Leopold Palmetshofer and Kurt Piplits and M. Grasserbauer",

year = "1995",

language = "English",

pages = "187",

editor = "{H.C. de Graaff, H. van Kranenburg}",

booktitle = "Proc. ESSDERC 95",

}