Modulation of the high mobility two-dimensional electrons in Si/SiGe using atomic-layer-deposited gate dielectric

Friedrich Schäffler, K. Lai, P. D. Ye, Michael Mühlberger, D.C. Tsui, S. Lyon, W. Pan

Research output: Working paper and reportsPreprint

Original languageEnglish
Number of pages3
DOIs
Publication statusPublished - 2005

Publication series

NamearXiv.org
ISSN (Print)2331-8422

Fields of science

  • 103 Physics, Astronomy
  • 103009 Solid state physics
  • 103011 Semiconductor physics
  • 103017 Magnetism
  • 103018 Materials physics
  • 103040 Photonics
  • 202032 Photovoltaics
  • 210006 Nanotechnology

Cite this