Abstract
Piezoelectric fluid sensors with LFE electrode arrangement (LFE: lateral field excitation - both electrodes are placed on one side of the disc) show unique differences compared to common thickness field excited (TFE) resonators, due to the additional lateral field components produced. In this contribution the LFE-sensor setup is modeled as a layered structure in the spectral domain utilizing a semi-numerical approach. In particular the interaction of the piezoelectric disc and the sample liquid, which is too complex for analytical methods or too comprehensive for FEM, is efficiently modeled by the method. The calculation of the frequency responses as well as the electrical and the mechanical fields are illustrated. The simulation results are compared to results obtained from the Christoffel-- Bechmann formalism, and sensitivities to fluid parameters like viscosity, density and conductivity are shown. Furthermore, the sensitivity to viscosity is compared to experimental data.
Original language | English |
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Pages (from-to) | 129-134 |
Number of pages | 6 |
Journal | Sensors and Actuators A: Physical |
Volume | 172 |
Issue number | 1 |
DOIs | |
Publication status | Published - Apr 2011 |
Fields of science
- 203017 Micromechanics
- 202019 High frequency engineering
- 202028 Microelectronics
- 202039 Theoretical electrical engineering
- 202037 Signal processing
- 202027 Mechatronics
- 202036 Sensor systems
JKU Focus areas
- Mechatronics and Information Processing