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Miniaturized Sensors for Physical Fluid Properties

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original languageEnglish
Title of host publicationProc. of the 9th International Conference on Mulit-Material Micro Manufacture (4M2012)
PublisherResearch Publishing
Pages3-6
Number of pages4
ISBN (Print)9789810733537
Publication statusPublished - 2012

Fields of science

  • 203017 Micromechanics
  • 202028 Microelectronics
  • 202027 Mechatronics
  • 202036 Sensor systems

JKU Focus areas

  • Mechatronics and Information Processing

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