Abstract
Sensors for the determination of fluid and gas properties are being employed for direct and indirect condition monitoring in many application areas of instrumentation and automation. This article presents various robust sensors devised to measure flow properties (velocity, direction, and mass flow) as well as thermal properties (thermal conductivity and diffusivity) of fluids. These sensors are based on a thermal operation principle and can be manufactured with cost-effective microtechnology. Starting from one generic design, they can be implemented and operated as calorimetric flow sensors or thermal conductivity sensors. This article explains the theoretical foundations and discusses several application examples.
| Translated title of the contribution | Miniaturized thermal fluid sensors – Flow and thermal conductivity sensors |
|---|---|
| Original language | German (Austria) |
| Pages (from-to) | 191-198 |
| Number of pages | 8 |
| Journal | e&i Elektrotechnik und Informationstechnik |
| Volume | 132 |
| Issue number | 4-5 |
| DOIs | |
| Publication status | Published - 07 Aug 2015 |
Fields of science
- 202019 High frequency engineering
- 202021 Industrial electronics
- 202036 Sensor systems
- 203017 Micromechanics
- 202 Electrical Engineering, Electronics, Information Engineering
- 202027 Mechatronics
- 202028 Microelectronics
- 202037 Signal processing
JKU Focus areas
- Mechatronics and Information Processing