Micromachined thermal conductivity sensor for the liquid phase

J. Kuntner; F. Kohl; B. Jakoby

doi:10.1109/SENSOR.2005.1496481

Micromachined thermal conductivity sensor for the liquid phase

J. Kuntner, F. Kohl, B. Jakoby

Vienna University of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
Pages	571-574
Volume	1
DOIs	https://doi.org/10.1109/SENSOR.2005.1496481
Publication status	Published - 2005
Externally published	Yes

Fields of science

202 Electrical Engineering, Electronics, Information Engineering

Access to Document

10.1109/SENSOR.2005.1496481

Cite this

@inproceedings{d6e5157c7fb647ad853a695f3d750050,

title = "Micromachined thermal conductivity sensor for the liquid phase",

keywords = "Thermal conductivity, Thermal sensors, Silicon, Biomembranes, Temperature sensors, Thermistors, Germanium, Amorphous materials, Sensor systems, Liquids",

author = "J. Kuntner and F. Kohl and B. Jakoby",

year = "2005",

doi = "10.1109/SENSOR.2005.1496481",

language = "English",

volume = "1",

pages = "571--574",

booktitle = "The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.",

}

Micromachined thermal conductivity sensor for the liquid phase. / Kuntner, J.; Kohl, F.; Jakoby, B.
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.. Vol. 1 2005. p. 571-574 2E4.30.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

TY - GEN

T1 - Micromachined thermal conductivity sensor for the liquid phase

AU - Kuntner, J.

AU - Kohl, F.

AU - Jakoby, B.

PY - 2005

Y1 - 2005

KW - Thermal conductivity

KW - Thermal sensors

KW - Silicon

KW - Biomembranes

KW - Temperature sensors

KW - Thermistors

KW - Germanium

KW - Amorphous materials

KW - Sensor systems

KW - Liquids

U2 - 10.1109/SENSOR.2005.1496481

DO - 10.1109/SENSOR.2005.1496481

M3 - Conference proceedings

VL - 1

SP - 571

EP - 574

BT - The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.

ER -