Messung physikalischer Flüssigkeitseigenschaften mit beidseitig eingespannten Balkenstrukturen

In this contribution the concept of a viscosity and mass density sensor for the liquid phase based on a vibrating clamped-clamped beam structure is investigated. The liquid’s influence on the frequency response ismodelled by calculating the resistance force acting on the structure by numerically solving the two-dimensional flow and pressure fields in the cross sectional plane. Besides presenting a micromachined prototype in silicon technology, measurements have been carried out with a PMMA-based sensor element featuring an electromagnetic actuation and an inductive readout. A simple optical method is used to verify the measured frequency response.