Measurement of Liquid Properties Using a Vibrating Micromachined Clamped-Clamped Beam Structure

Erwin Reichel; Christian Riesch; Bernhard Weiß; Franz Keplinger; Bernhard Jakoby

Measurement of Liquid Properties Using a Vibrating Micromachined Clamped-Clamped Beam Structure

Erwin Reichel, Christian Riesch, Bernhard Weiß, Franz Keplinger, Bernhard Jakoby

Institute of Microelectronics and Microsensors

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Abstract

In this contribution the concept of a viscosity and mass density sensor for the liquid phase based on a vibrating clamped-clamped beam structure is investigated. The liquids influence on the frequency response is modelled by calculating the resistance force acting on the structure by numerically solving the two-dimensional flow and pressure fields in the cross sectional plane. Besides presenting a micromachined prototype in silicon technology, measurements have been carried out with a PMMA-based sensor element featuring an electromagnetic actuation and an inductive readout.

Original language	English
Title of host publication	Proc. SENSOR Conference, Nürnberg, May 2007
Editors	AMA Service GmbH
Pages	33-38
Number of pages	6
Volume	II
Publication status	Published - 2007

Fields of science

202036 Sensor systems

Cite this

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title = "Measurement of Liquid Properties Using a Vibrating Micromachined Clamped-Clamped Beam Structure",

abstract = "In this contribution the concept of a viscosity and mass density sensor for the liquid phase based on a vibrating clamped-clamped beam structure is investigated. The liquids influence on the frequency response is modelled by calculating the resistance force acting on the structure by numerically solving the two-dimensional flow and pressure fields in the cross sectional plane. Besides presenting a micromachined prototype in silicon technology, measurements have been carried out with a PMMA-based sensor element featuring an electromagnetic actuation and an inductive readout.",

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year = "2007",

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AU - Reichel, Erwin

AU - Riesch, Christian

AU - Weiß, Bernhard

AU - Keplinger, Franz

AU - Jakoby, Bernhard

PY - 2007

Y1 - 2007

N2 - In this contribution the concept of a viscosity and mass density sensor for the liquid phase based on a vibrating clamped-clamped beam structure is investigated. The liquids influence on the frequency response is modelled by calculating the resistance force acting on the structure by numerically solving the two-dimensional flow and pressure fields in the cross sectional plane. Besides presenting a micromachined prototype in silicon technology, measurements have been carried out with a PMMA-based sensor element featuring an electromagnetic actuation and an inductive readout.

AB - In this contribution the concept of a viscosity and mass density sensor for the liquid phase based on a vibrating clamped-clamped beam structure is investigated. The liquids influence on the frequency response is modelled by calculating the resistance force acting on the structure by numerically solving the two-dimensional flow and pressure fields in the cross sectional plane. Besides presenting a micromachined prototype in silicon technology, measurements have been carried out with a PMMA-based sensor element featuring an electromagnetic actuation and an inductive readout.

M3 - Conference proceedings

SN - 978-3-9810993-2-4

VL - II

SP - 33

EP - 38

BT - Proc. SENSOR Conference, Nürnberg, May 2007

A2 - AMA Service GmbH, null

ER -