LCVD of Tungsten Microstructures on Quartz

Z. Toth, P.B. Kargl, Christos Grivas, Klaus Piglmayer, Tamas Szörényi, Dieter Bäuerle

Research output: Contribution to journal › Article › peer-review

Fields of science

@article{72479443ecfd474985ea1d9c41ef2a9e,

title = "LCVD of Tungsten Microstructures on Quartz",

author = "Z. Toth and P.B. Kargl and Christos Grivas and Klaus Piglmayer and Tamas Sz{\"o}r{\'e}nyi and Dieter B{\"a}uerle",

year = "1992",

doi = "10.1007/BF00325499",

language = "English",

volume = "54",

pages = "189--192",

journal = "Applied Physics B",

issn = "0946-2171",

publisher = "Springer Verlag",

}