Lateral Growth Rates in Laser CVD of Tungsten Microstructures

Tamas Szörényi; Klaus Piglmayer; Gui qiang Zhang; Dieter Bäuerle

doi:10.1016/0039-6028(88)90046-5

Lateral Growth Rates in Laser CVD of Tungsten Microstructures

Tamas Szörényi, Klaus Piglmayer, Gui qiang Zhang, Dieter Bäuerle

Institute of Applied Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	442-456
Number of pages	15
Journal	Surface Science
Volume	202
Issue number	3
DOIs	https://doi.org/10.1016/0039-6028(88)90046-5
Publication status	Published - 02 Aug 1988

Fields of science

103016 Laser physics
103020 Surface physics
103 Physics, Astronomy
103008 Experimental physics
103021 Optics
103023 Polymer physics

JKU Focus areas

Engineering and Natural Sciences (in general)

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10.1016/0039-6028(88)90046-5

Cite this

@article{1b4eccdbf04e4a1fb2b0657985d13ef9,

title = "Lateral Growth Rates in Laser CVD of Tungsten Microstructures",

author = "Tamas Sz{\"o}r{\'e}nyi and Klaus Piglmayer and Zhang, \{Gui qiang\} and Dieter B{\"a}uerle",

year = "1988",

month = aug,

day = "2",

doi = "10.1016/0039-6028(88)90046-5",

language = "English",

volume = "202",

pages = "442--456",

journal = "Surface Science",

issn = "1879-2758",

publisher = "Elsevier B.V.",

number = "3",

}

TY - JOUR

T1 - Lateral Growth Rates in Laser CVD of Tungsten Microstructures

AU - Szörényi, Tamas

AU - Piglmayer, Klaus

AU - Zhang, Gui qiang

AU - Bäuerle, Dieter

PY - 1988/8/2

Y1 - 1988/8/2

UR - https://www.scopus.com/pages/publications/0000334385

U2 - 10.1016/0039-6028(88)90046-5

DO - 10.1016/0039-6028(88)90046-5

M3 - Article

SN - 1879-2758

VL - 202

SP - 442

EP - 456

JO - Surface Science

JF - Surface Science

IS - 3

ER -

Lateral Growth Rates in Laser CVD of Tungsten Microstructures

Fields of science

JKU Focus areas

Access to Document

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Cite this