Laser-Induced Surface Modification and Etching of Materials

Dieter Bäuerle, Michael Eyett, Ulrike Kolzer, R. Kullmer, Peter Mogyorosi, Klaus Piglmayer

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	Laser- and Particle-Beam Chemical Processing for Microelectronics
Editors	D.J. Ehrlich, G.S. Higashi, M.M. Oprysko
Pages	411
Number of pages	10
Publication status	Published - 1988

Name	Materials Research Society

Fields of science

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title = "Laser-Induced Surface Modification and Etching of Materials",

author = "Dieter B{\"a}uerle and Michael Eyett and Ulrike Kolzer and R. Kullmer and Peter Mogyorosi and Klaus Piglmayer",

year = "1988",

language = "English",

series = "Materials Research Society",

pages = "411",

editor = "{D.J. Ehrlich, G.S. Higashi, M.M. Oprysko}",

booktitle = "Laser- and Particle-Beam Chemical Processing for Microelectronics",

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Laser-Induced Surface Modification and Etching of Materials. / Bäuerle, Dieter; Eyett, Michael; Kolzer, Ulrike et al.
Laser- and Particle-Beam Chemical Processing for Microelectronics. ed. / D.J. Ehrlich, G.S. Higashi, M.M. Oprysko. 1988. p. 411 (Materials Research Society).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

TY - GEN

T1 - Laser-Induced Surface Modification and Etching of Materials

AU - Bäuerle, Dieter

AU - Eyett, Michael

AU - Kolzer, Ulrike

AU - Kullmer, R.

AU - Mogyorosi, Peter

AU - Piglmayer, Klaus

PY - 1988

Y1 - 1988

M3 - Conference proceedings

T3 - Materials Research Society

SP - 411

BT - Laser- and Particle-Beam Chemical Processing for Microelectronics

A2 - D.J. Ehrlich, G.S. Higashi, M.M. Oprysko, null

ER -