@inproceedings{2122360b7d7045869339f9a160818a92,
title = "Laser-Induced Surface Modification and Chemical Etching of Materials",
author = "Michael Eyett and R. Kullmer and Dieter B{\"a}uerle",
year = "1987",
month = sep,
day = "22",
doi = "10.1117/12.941236",
language = "English",
volume = "801",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
pages = "156--162",
booktitle = "High Power Lasers: Sources, Laser-Material Interactions, High Excitations, and Fast Dynamics",
}