Laser-induced single step micro/nanopatterning

Dieter Bäuerle; G. Wysocki; L. Landström; J. Klimstein; Klaus Piglmayer; Johannes Heitz

doi:10.1117/12.541052

Laser-induced single step micro/nanopatterning

Dieter Bäuerle, G. Wysocki, L. Landström, J. Klimstein, Klaus Piglmayer, Johannes Heitz

Institute of Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	Fourth International Symposium on Laser Precision Microfabrication
Pages	8-12
Number of pages	5
Volume	5063
DOIs	https://doi.org/10.1117/12.541052
Publication status	Published - Jan 2003

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering

Fields of science

103016 Laser physics
210005 Nanophotonics

Access to Document

10.1117/12.541052

Cite this

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title = "Laser-induced single step micro/nanopatterning",

author = "Dieter B{\"a}uerle and G. Wysocki and L. Landstr{\"o}m and J. Klimstein and Klaus Piglmayer and Johannes Heitz",

year = "2003",

month = jan,

doi = "10.1117/12.541052",

language = "English",

volume = "5063",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

pages = "8--12",

booktitle = "Fourth International Symposium on Laser Precision Microfabrication",

}

Laser-induced single step micro/nanopatterning. / Bäuerle, Dieter; Wysocki, G.; Landström, L. et al.
Fourth International Symposium on Laser Precision Microfabrication. Vol. 5063 2003. p. 8-12 (Proceedings of SPIE - The International Society for Optical Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

TY - GEN

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AU - Bäuerle, Dieter

AU - Wysocki, G.

AU - Landström, L.

AU - Klimstein, J.

AU - Piglmayer, Klaus

AU - Heitz, Johannes

PY - 2003/1

Y1 - 2003/1

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DO - 10.1117/12.541052

M3 - Conference proceedings

VL - 5063

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 8

EP - 12

BT - Fourth International Symposium on Laser Precision Microfabrication

ER -