Laser-induced Fabrication and Processing of Semiconductors: Recent Developments

Dieter Bäuerle

doi:10.1002/(SICI)1521-396X(199804)166:2<543::AID-PSSA543>3.0.CO;2-P

Laser-induced Fabrication and Processing of Semiconductors: Recent Developments

Dieter Bäuerle

Institute of Applied Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	543-554
Number of pages	12
Journal	Physica Status Solidi A: Applications and Materials Science
Volume	166
Issue number	2
DOIs	https://doi.org/10.1002/(SICI)1521-396X(199804)166:2<543::AID-PSSA543>3.0.CO;2-P
Publication status	Published - Apr 1998

Fields of science

103016 Laser physics
210005 Nanophotonics

JKU Focus areas

Engineering and Natural Sciences (in general)

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1002/(SICI)1521-396X(199804)166:2<543::AID-PSSA543>3.0.CO;2-P

Cite this

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title = "Laser-induced Fabrication and Processing of Semiconductors: Recent Developments",

author = "Dieter B{\"a}uerle",

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volume = "166",

pages = "543--554",

journal = "Physica Status Solidi A: Applications and Materials Science",

issn = "1862-6300",

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AU - Bäuerle, Dieter

PY - 1998/4

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DO - 10.1002/(SICI)1521-396X(199804)166:2<543::AID-PSSA543>3.0.CO;2-P

M3 - Article

SN - 1862-6300

VL - 166

SP - 543

EP - 554

JO - Physica Status Solidi A: Applications and Materials Science

JF - Physica Status Solidi A: Applications and Materials Science

IS - 2

ER -

Laser-induced Fabrication and Processing of Semiconductors: Recent Developments

Fields of science

JKU Focus areas

UN SDGs

Access to Document

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Cite this