Laser-induced etching and deposition of tungsten in WF6 – H2 atmosphere

Klaus Piglmayer; Z. Toth; Z. Kantor

doi:10.1016/0169-4332(94)00434-X

Laser-induced etching and deposition of tungsten in WF6 – H2 atmosphere

Klaus Piglmayer
, Z. Toth
, Z. Kantor

Institute of Applied Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	484-487
Number of pages	4
Journal	Applied Surface Science
Volume	86
Issue number	1-4
DOIs	https://doi.org/10.1016/0169-4332(94)00434-X
Publication status	Published - Feb 1995

Fields of science

103016 Laser physics
103020 Surface physics
103 Physics, Astronomy
103008 Experimental physics
103021 Optics
103023 Polymer physics

JKU Focus areas

Engineering and Natural Sciences (in general)

Access to Document

10.1016/0169-4332(94)00434-X

Cite this

@article{221270cca19841348df0cb3fa40c57e6,

title = "Laser-induced etching and deposition of tungsten in WF6 – H2 atmosphere",

author = "Klaus Piglmayer and Z. Toth and Z. Kantor",

year = "1995",

month = feb,

doi = "10.1016/0169-4332(94)00434-X",

language = "English",

volume = "86",

pages = "484--487",

journal = "Applied Surface Science",

issn = "1873-5584",

publisher = "Elsevier",

number = "1-4",

}

TY - JOUR

T1 - Laser-induced etching and deposition of tungsten in WF6 – H2 atmosphere

AU - Piglmayer, Klaus

AU - Toth, Z.

AU - Kantor, Z.

PY - 1995/2

Y1 - 1995/2

UR - https://www.scopus.com/pages/publications/0029250874

U2 - 10.1016/0169-4332(94)00434-X

DO - 10.1016/0169-4332(94)00434-X

M3 - Article

SN - 1873-5584

VL - 86

SP - 484

EP - 487

JO - Applied Surface Science

JF - Applied Surface Science

IS - 1-4

ER -

Laser-induced etching and deposition of tungsten in WF6 – H2 atmosphere

Fields of science

JKU Focus areas

Access to Document

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Cite this