. Laser-induced Etching and Deposition of Tungsten in Tungstenhexafluoride-Hydrogen Atmosphere

Klaus Piglmayer; Z. Toth; Z. Kantor

doi:10.1117/12.203636

. Laser-induced Etching and Deposition of Tungsten in Tungstenhexafluoride-Hydrogen Atmosphere

Klaus Piglmayer
, Z. Toth
, Z. Kantor

Institute of Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	Laser Methods of Surface Treatment and Modification
Editors	Alexander M. Prokhorov, Vladimir I. Pustovoy
Pages	45-50
Number of pages	6
Volume	2498
DOIs	https://doi.org/10.1117/12.203636
Publication status	Published - 1995

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	2498
ISSN (Print)	0277-786X

Fields of science

103016 Laser physics
103020 Surface physics
103 Physics, Astronomy
103008 Experimental physics
103021 Optics
103023 Polymer physics

JKU Focus areas

Engineering and Natural Sciences (in general)

Access to Document

10.1117/12.203636

Cite this

Piglmayer, K., Toth, Z., & Kantor, Z. (1995). . Laser-induced Etching and Deposition of Tungsten in Tungstenhexafluoride-Hydrogen Atmosphere. In A. M. Prokhorov, & V. I. Pustovoy (Eds.), Laser Methods of Surface Treatment and Modification (Vol. 2498, pp. 45-50). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2498). https://doi.org/10.1117/12.203636

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title = ". Laser-induced Etching and Deposition of Tungsten in Tungstenhexafluoride-Hydrogen Atmosphere",

author = "Klaus Piglmayer and Z. Toth and Z. Kantor",

year = "1995",

doi = "10.1117/12.203636",

language = "English",

isbn = "0819418552",

volume = "2498",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

pages = "45--50",

editor = "Prokhorov, \{Alexander M.\} and Pustovoy, \{Vladimir I.\}",

booktitle = "Laser Methods of Surface Treatment and Modification",

}

. Laser-induced Etching and Deposition of Tungsten in Tungstenhexafluoride-Hydrogen Atmosphere. / Piglmayer, Klaus; Toth, Z.; Kantor, Z.
Laser Methods of Surface Treatment and Modification. ed. / Alexander M. Prokhorov; Vladimir I. Pustovoy. Vol. 2498 1995. p. 45-50 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2498).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

TY - GEN

T1 - . Laser-induced Etching and Deposition of Tungsten in Tungstenhexafluoride-Hydrogen Atmosphere

AU - Piglmayer, Klaus

AU - Toth, Z.

AU - Kantor, Z.

PY - 1995

Y1 - 1995

UR - https://www.scopus.com/pages/publications/0029222950

U2 - 10.1117/12.203636

DO - 10.1117/12.203636

M3 - Conference proceedings

SN - 0819418552

VL - 2498

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 45

EP - 50

BT - Laser Methods of Surface Treatment and Modification

A2 - Prokhorov, Alexander M.

A2 - Pustovoy, Vladimir I.

ER -

. Laser-induced Etching and Deposition of Tungsten in Tungstenhexafluoride-Hydrogen Atmosphere

Publication series

Fields of science

JKU Focus areas

Access to Document

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Cite this