. Laser-induced Etching and Deposition of Tungsten in Tungstenhexafluoride-Hydrogen Atmosphere

Klaus Piglmayer, Z. Toth, Z. Kantor

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	Laser Methods of Surface Treatment and Modification
Editors	V.I. Pustovoy
Pages	45
Number of pages	6
Volume	2498
DOIs	https://doi.org/10.1117/12.203636
Publication status	Published - 1995

Name	Proceedings of SPIE - The International Society for Optical Engineering

Fields of science

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title = ". Laser-induced Etching and Deposition of Tungsten in Tungstenhexafluoride-Hydrogen Atmosphere",

author = "Klaus Piglmayer and Z. Toth and Z. Kantor",

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language = "English",

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series = "Proceedings of SPIE - The International Society for Optical Engineering",

pages = "45",

editor = "\{V.I. Pustovoy\}",

booktitle = "Laser Methods of Surface Treatment and Modification",

}

. Laser-induced Etching and Deposition of Tungsten in Tungstenhexafluoride-Hydrogen Atmosphere. / Piglmayer, Klaus; Toth, Z.; Kantor, Z.
Laser Methods of Surface Treatment and Modification. ed. / V.I. Pustovoy. Vol. 2498 1995. p. 45 (Proceedings of SPIE - The International Society for Optical Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

TY - GEN

T1 - . Laser-induced Etching and Deposition of Tungsten in Tungstenhexafluoride-Hydrogen Atmosphere

AU - Piglmayer, Klaus

AU - Toth, Z.

AU - Kantor, Z.

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T3 - Proceedings of SPIE - The International Society for Optical Engineering

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BT - Laser Methods of Surface Treatment and Modification

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