Laser-Induced Deposition and Etching of Tungsten Microstructures

Klaus Piglmayer; Helmut Schieche; R. Chabicovsky

Laser-Induced Deposition and Etching of Tungsten Microstructures

Klaus Piglmayer
, Helmut Schieche
, R. Chabicovsky

Institute of Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	Proceedings of the Seminar "Grundlagen und Technologie elektronischer Bauelemente"
Editors	Gesellschaft für Mikroelektronik, Wien, Grossarl
Pages	87
Number of pages	6
Publication status	Published - 1997

Fields of science

103016 Laser physics
210005 Nanophotonics

JKU Focus areas

Engineering and Natural Sciences (in general)

Cite this

@inproceedings{0c8e5ac8237046c5a74b9424c9bb8f36,

title = "Laser-Induced Deposition and Etching of Tungsten Microstructures",

author = "Klaus Piglmayer and Helmut Schieche and R. Chabicovsky",

year = "1997",

language = "English",

isbn = "3-901578-02-1",

pages = "87",

editor = "\{Gesellschaft f{\"u}r Mikroelektronik, Wien, Grossarl\}",

booktitle = "Proceedings of the Seminar {"}Grundlagen und Technologie elektronischer Bauelemente{"}",

}

Laser-Induced Deposition and Etching of Tungsten Microstructures. / Piglmayer, Klaus; Schieche, Helmut; Chabicovsky, R.
Proceedings of the Seminar "Grundlagen und Technologie elektronischer Bauelemente". ed. / Gesellschaft für Mikroelektronik, Wien, Grossarl. 1997. p. 87.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

TY - GEN

T1 - Laser-Induced Deposition and Etching of Tungsten Microstructures

AU - Piglmayer, Klaus

AU - Schieche, Helmut

AU - Chabicovsky, R.

PY - 1997

Y1 - 1997

M3 - Conference proceedings

SN - 3-901578-02-1

SP - 87

BT - Proceedings of the Seminar "Grundlagen und Technologie elektronischer Bauelemente"

A2 - Gesellschaft für Mikroelektronik, Wien, Grossarl, null

ER -