Laser Induced Chemical Vapor Deposition of C and Si

Dieter Bäuerle, Günter Leyendecker, P. Geittner, H. Lydtin

Research output: Contribution to journal › Article › peer-review

Fields of science

@article{c3242bae28374bb89a861d7d90ee279c,

title = "Laser Induced Chemical Vapor Deposition of C and Si",

author = "Dieter B{\"a}uerle and G{\"u}nter Leyendecker and P. Geittner and H. Lydtin",

year = "1982",

language = "English",

volume = "28",

pages = "267",

journal = "Applied Physics B",

issn = "0946-2171",

publisher = "Springer Verlag",

}