Laser-Induced Chemical Etching of Silicon in Chlorine Atmosphere: I. Pulsed-Irradiation

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@article{91261e4ceb7e419292f99d12320253db,

title = "Laser-Induced Chemical Etching of Silicon in Chlorine Atmosphere: I. Pulsed-Irradiation",

author = "R. Kullmer and Dieter B{\"a}uerle",

year = "1987",

doi = "10.1007/BF00615982",

language = "English",

volume = "43",

pages = "227--232",

journal = "Applied Physics A",

issn = "1432-0630",

publisher = "Springer Verlag",

}