Laser assisted particle removal from silicon wafers

M. Mosbacher; H.-J. Münzer; M. Bertsch; V. Dobler; N. Chaoui; Jakub Siegel; Roland Oltra; Dieter Bäuerle; J. Boneberg; Paul Leiderer

Laser assisted particle removal from silicon wafers

M. Mosbacher
, H.-J. Münzer
, M. Bertsch
, V. Dobler
, N. Chaoui
, Jakub Siegel
, Roland Oltra
, Dieter Bäuerle
, J. Boneberg
, Paul Leiderer

Institute of Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	Particles on surfaces 7: detection, adhesion and removal
Editors	K.L. Mittal
Place of Publication	Utrecht
Publisher	VSP
Pages	291
Number of pages	10
ISBN (Print)	978-9067-64372-6
Publication status	Published - 2002

Fields of science

103016 Laser physics
210005 Nanophotonics

JKU Focus areas

Engineering and Natural Sciences (in general)

Cite this

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title = "Laser assisted particle removal from silicon wafers",

author = "M. Mosbacher and H.-J. M{\"u}nzer and M. Bertsch and V. Dobler and N. Chaoui and Jakub Siegel and Roland Oltra and Dieter B{\"a}uerle and J. Boneberg and Paul Leiderer",

year = "2002",

language = "English",

isbn = "978-9067-64372-6",

pages = "291",

editor = "\{K.L. Mittal\}",

booktitle = "Particles on surfaces 7: detection, adhesion and removal",

publisher = "VSP",

}

TY - GEN

T1 - Laser assisted particle removal from silicon wafers

AU - Mosbacher, M.

AU - Münzer, H.-J.

AU - Bertsch, M.

AU - Dobler, V.

AU - Chaoui, N.

AU - Siegel, Jakub

AU - Oltra, Roland

AU - Bäuerle, Dieter

AU - Boneberg, J.

AU - Leiderer, Paul

PY - 2002

Y1 - 2002

M3 - Conference proceedings

SN - 978-9067-64372-6

SP - 291

BT - Particles on surfaces 7: detection, adhesion and removal

A2 - K.L. Mittal, null

PB - VSP

CY - Utrecht

ER -