Laser Assisted Chemical Vapour Deposition of Hydrogen Containing Amorphous Carbon at Room Temperature

G. Stenberg; Klaus Piglmayer; Mats Boman; J.O. Carlsson

doi:10.1016/S0169-4332(96)00911-7

Laser Assisted Chemical Vapour Deposition of Hydrogen Containing Amorphous Carbon at Room Temperature

G. Stenberg
, Klaus Piglmayer
, Mats Boman
, J.O. Carlsson

Institute of Applied Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	549-553
Number of pages	5
Journal	Applied Surface Science
Volume	109-110
DOIs	https://doi.org/10.1016/S0169-4332(96)00911-7
Publication status	Published - Feb 1997

Fields of science

103016 Laser physics
210005 Nanophotonics

JKU Focus areas

Engineering and Natural Sciences (in general)

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10.1016/S0169-4332(96)00911-7

Cite this

@article{cc4d507f687844f184d444bc4ba6a650,

title = "Laser Assisted Chemical Vapour Deposition of Hydrogen Containing Amorphous Carbon at Room Temperature",

author = "G. Stenberg and Klaus Piglmayer and Mats Boman and J.O. Carlsson",

year = "1997",

month = feb,

doi = "10.1016/S0169-4332(96)00911-7",

language = "English",

volume = "109-110",

pages = "549--553",

journal = "Applied Surface Science",

issn = "1873-5584",

publisher = "Elsevier",

}

TY - JOUR

T1 - Laser Assisted Chemical Vapour Deposition of Hydrogen Containing Amorphous Carbon at Room Temperature

AU - Stenberg, G.

AU - Piglmayer, Klaus

AU - Boman, Mats

AU - Carlsson, J.O.

PY - 1997/2

Y1 - 1997/2

UR - https://www.scopus.com/pages/publications/0031076492

U2 - 10.1016/S0169-4332(96)00911-7

DO - 10.1016/S0169-4332(96)00911-7

M3 - Article

SN - 1873-5584

VL - 109-110

SP - 549

EP - 553

JO - Applied Surface Science

JF - Applied Surface Science

ER -

Laser Assisted Chemical Vapour Deposition of Hydrogen Containing Amorphous Carbon at Room Temperature

Fields of science

JKU Focus areas

Access to Document

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