Ion-beam direct-structuring of high-temperature superconductors

Wolfgang Lang; M. dineva; M. Marksteiner; T Enzenhofer; K. Siraj; Martin Peruzzi; Johannes David Pedarnig; Dieter Bäuerle; R. Kortner; E Cekan; Elmar Platzgummer; Hans Loeschner

doi:10.1016/j.mee.2006.01.091

Ion-beam direct-structuring of high-temperature superconductors

Wolfgang Lang, M. dineva, M. Marksteiner, T Enzenhofer, K. Siraj, Martin Peruzzi, Johannes David Pedarnig, Dieter Bäuerle, R. Kortner, E Cekan, Elmar Platzgummer, Hans Loeschner

Institute of Applied Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1495-1498
Number of pages	4
Journal	Microelectronic Engineering
Volume	83
Issue number	4-9 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.mee.2006.01.091
Publication status	Published - Apr 2006

Fields of science

103016 Laser physics
210005 Nanophotonics

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10.1016/j.mee.2006.01.091

Cite this

@article{509800d6f69741eb9196a856a7b92441,

title = "Ion-beam direct-structuring of high-temperature superconductors",

author = "Wolfgang Lang and M. dineva and M. Marksteiner and T Enzenhofer and K. Siraj and Martin Peruzzi and Pedarnig, \{Johannes David\} and Dieter B{\"a}uerle and R. Kortner and E Cekan and Elmar Platzgummer and Hans Loeschner",

year = "2006",

month = apr,

doi = "10.1016/j.mee.2006.01.091",

language = "English",

volume = "83",

pages = "1495--1498",

journal = "Microelectronic Engineering",

issn = "1873-5568",

publisher = "ELSEVIER SCIENCE BV",

number = "4-9 SPEC. ISS.",

}

TY - JOUR

T1 - Ion-beam direct-structuring of high-temperature superconductors

AU - Lang, Wolfgang

AU - dineva, M.

AU - Marksteiner, M.

AU - Enzenhofer, T

AU - Siraj, K.

AU - Peruzzi, Martin

AU - Pedarnig, Johannes David

AU - Bäuerle, Dieter

AU - Kortner, R.

AU - Cekan, E

AU - Platzgummer, Elmar

AU - Loeschner, Hans

PY - 2006/4

Y1 - 2006/4

UR - https://www.scopus.com/pages/publications/33646053810

U2 - 10.1016/j.mee.2006.01.091

DO - 10.1016/j.mee.2006.01.091

M3 - Article

SN - 1873-5568

VL - 83

SP - 1495

EP - 1498

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 4-9 SPEC. ISS.

ER -

Ion-beam direct-structuring of high-temperature superconductors

Fields of science

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