Investigation of incubation in ArF excimer laser irradiated poly(methyl-methacrylate) using pulsed force mode AFM

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Fields of science

@article{b3a9453f099f4d9c89359d9b5a1cd8dd,

title = "Investigation of incubation in ArF excimer laser irradiated poly(methyl-methacrylate) using pulsed force mode AFM",

author = "Sabine Hild",

year = "2004",

doi = "10.1063/1.1803632",

language = "English",

volume = "96",

pages = "5548--5551",

journal = "Journal of Applied Physics",

issn = "1089-7550",

publisher = "American Institute of Physics",

number = "10",

}