@article{224ecd6da1e14866aec8de50c176affc,
title = "Investigation of β-SiC precipitation in Si 1-yC y epilayers by x-ray scattering at grazing incidence",
author = "G{\"u}nther Bauer and Z. Kovats and Michael M{\"u}hlberger and Metzger, \{Till Hartmut\} and J. Peisl and Friedrich Sch{\"a}ffler and Julian Stangl and Y. Zhuang",
year = "2000",
month = jun,
day = "5",
doi = "10.1063/1.126662",
language = "English",
volume = "76",
pages = "3409--3411",
journal = "Applied Physics Letters",
publisher = "American Institute of Physics",
number = "23",
}