Introduction of a General Model for the Resonance Parameters of Fluid Sensors and Validation with Recent Sensor Setups

Martin Heinisch; Thomas Voglhuber-Brunnmaier; Isabelle Dufour; Bernhard Jakoby

Introduction of a General Model for the Resonance Parameters of Fluid Sensors and Validation with Recent Sensor Setups

Martin Heinisch, Thomas Voglhuber-Brunnmaier, Isabelle Dufour, Bernhard Jakoby

Institute of Microelectronics and Microsensors

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Abstract

comprehensive investigation and comparison of recently published resonant viscosity and mass density sensors are presented. This investigation is based on the application of a generalized model and a subsequent interpretation of results. The devised model relates the measured resonant parameters (resonance frequency and quality factor) of the frequency re- sponse to the physical parameters of the fluid (mass density, shear viscosity and temperature). The presented model is applied to eight different resonant sensors in a frequency range from 400 Hz to 3.7 MHz and quality factors between 0.7 to 500.

Original language	English
Title of host publication	Proceedings IEEE Sensors 2014
Number of pages	4
Publication status	Published - Nov 2014

Fields of science

202019 High frequency engineering
202021 Industrial electronics
202036 Sensor systems
203017 Micromechanics
202 Electrical Engineering, Electronics, Information Engineering
202027 Mechatronics
202028 Microelectronics
202037 Signal processing

JKU Focus areas

Mechatronics and Information Processing

Cite this

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title = "Introduction of a General Model for the Resonance Parameters of Fluid Sensors and Validation with Recent Sensor Setups",

abstract = "comprehensive investigation and comparison of recently published resonant viscosity and mass density sensors are presented. This investigation is based on the application of a generalized model and a subsequent interpretation of results. The devised model relates the measured resonant parameters (resonance frequency and quality factor) of the frequency re- sponse to the physical parameters of the fluid (mass density, shear viscosity and temperature). The presented model is applied to eight different resonant sensors in a frequency range from 400 Hz to 3.7 MHz and quality factors between 0.7 to 500.",

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AU - Dufour, Isabelle

AU - Jakoby, Bernhard

PY - 2014/11

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AB - comprehensive investigation and comparison of recently published resonant viscosity and mass density sensors are presented. This investigation is based on the application of a generalized model and a subsequent interpretation of results. The devised model relates the measured resonant parameters (resonance frequency and quality factor) of the frequency re- sponse to the physical parameters of the fluid (mass density, shear viscosity and temperature). The presented model is applied to eight different resonant sensors in a frequency range from 400 Hz to 3.7 MHz and quality factors between 0.7 to 500.

M3 - Conference proceedings

BT - Proceedings IEEE Sensors 2014

ER -