Original language | English |
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Pages (from-to) | C3G19-C3G23 |
Number of pages | 5 |
Journal | Journal of Vacuum Science and Technology B |
Volume | 28 |
Publication status | Published - 2010 |
Fields of science
- 103026 Quantum optics
- 103009 Solid state physics
- 103 Physics, Astronomy
- 103011 Semiconductor physics
- 202018 Semiconductor electronics
- 210006 Nanotechnology
JKU Focus areas
- Engineering and Natural Sciences (in general)