Integral design of a microacoustic wave-based sensor device

G. W. Lubking, Bernhard Jakoby, Michael J. Vellekoop

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	265-273
Number of pages	9
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3328
DOIs	https://doi.org/10.1117/12.320177
Publication status	Published - 1998
Externally published	Yes
Event	Smart Structures and Materials 1998: Smart Electronics and MEMS - San Diego, CA, United States Duration: 02 Mar 1998 → 02 Mar 1998

Fields of science

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title = "Integral design of a microacoustic wave-based sensor device",

author = "Lubking, {G. W.} and Bernhard Jakoby and Vellekoop, {Michael J.}",

year = "1998",

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language = "English",

volume = "3328",

pages = "265--273",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

note = "Smart Structures and Materials 1998: Smart Electronics and MEMS ; Conference date: 02-03-1998 Through 02-03-1998",

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T1 - Integral design of a microacoustic wave-based sensor device

AU - Lubking, G. W.

AU - Jakoby, Bernhard

AU - Vellekoop, Michael J.

PY - 1998

Y1 - 1998

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M3 - Conference article

AN - SCOPUS:58649085032

SN - 0277-786X

VL - 3328

SP - 265

EP - 273

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Smart Structures and Materials 1998: Smart Electronics and MEMS

Y2 - 2 March 1998 through 2 March 1998

ER -