@article{c1012fe35911484fb8baddf1a6d784da,
title = "Instrumentation and uncertainty evaluation for absolute characterization of thin films and nanostructured surfaces in advanced optical metrology",
keywords = "comparison, ellipsometry, nanostructures, reflectometry, scatterometry, thin films, uncertainty evaluation",
author = "Hansen, \{Poul Erik\} and Lauryna Siaudinyte and Sebastian Heidenreich and Victor Soltwisch and Lokhorst, \{Hendrik W.\} and Atul Tiwari and Igor Makhotkin and Aleksi Mattila and Antti Lassila and Sven Glabisch and Sophia Schr{\"o}der and Sascha Brose and Emmanuel Nolot and Thomas Siefke and Muharrem Asar and Sema Memis and Furkan Y{\'i}ld{\'i}z and Manuela Schiek and R{\o}mer, \{Astrid T.\}",
note = "Publisher Copyright: {\textcopyright} 2025 BIPM \& IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.",
year = "2025",
month = apr,
day = "1",
doi = "10.1088/1681-7575/adbbf3",
language = "English",
volume = "62",
journal = "Metrologia",
issn = "0026-1394",
number = "2",
}